robot型号 Model | UTM-R3700F | |
robot形状 Robot Type | 6轴水平·垂直间接型 6-axis articulated system | |
动作范围 Operation Range | X, A-axis | 590mm |
θ-axis | 330deg. | |
Z-axis | 310-703.8mm | |
Y-axis | ±767.5mm | |
最高动作速度 Max. Operation Speed | X, A-axis | 1600mm/sec |
θ-axis | 540deg/sec | |
Z-axis | 1500mm/sec | |
Y-axis | 1500mm/sec | |
分解力 Resolution | X, A-axis | 0.001mm/pulse |
θ-axis | 0.001deg/pulse | |
Y-axis | 0.001mm/pulse | |
Z-axis | 0.001mm/pulse | |
重复位置精度 Repeatability | ±0.1mm | |
清洁度 Cleanliness | ISO Class 3 (ISO-14644) | |
必要条件 Facilities | 电源 Power | 3 Phases 200 VAC 20A |
真空 Vacuum | -80kPa or less, 15NL/min | |
压空(可选择) CDA (Optional) |
0.3-0.6MPa | |
可搬运重量(含hand) Payload (including E/E) | 0.5kg/arm | |
周围环境 Environment | 温度 Temperature | 0-40deg.C |
湿度 Humidity | 70% or less (No condensation) | |
本体质量 Mass | Approx. 74kg |
*1 Repeatability of 100 cycles operation including the CW and CCW approaches.